Air-floating vertical motion table
The APL210Z series is driven by a linear motor without backlash, in which the porous medium produces a uniform air film to realize the smooth movement of the motion table without friction and vibration. Due to the non-contact structure and the system is equipped with a high-precision grating ruler, the following error of the system has been improved compared with the mechanical guide structure, and the positioning accuracy and repeated positioning accuracy have been significantly improved.
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