APL210Z Series

The APL210Z series is driven by a linear motor without backlash, in which the porous medium produces a uniform air film to realize the smooth movement of the motion table without friction and vibration. Due to the non-contact structure and the system is equipped with a high-precision grating ruler, the following error of the system has been improved compared with the mechanical guide structure, and the positioning accuracy and repeated positioning accuracy have been significantly improved.

Product features:

High response speed

High flexible cable management
Zero friction counterweight cylinder

porous medium air bearing
Nanoscale positioning accuracy
Customizable (customizable ceramic structure)
High dynamic performance (cut-off frequency greater than 100Hz)
Resolution 0.1nm, repeat positioning accuracy 150nm, positioning accuracy ± 300nm

Keywords: Optics

Classification:

Air-floating vertical motion table

Online Message

Product inquiry

E-mail:

sales01@zssp-tech.com

Product Description

Product size plan

Mechanical Specifications	APL210Z-50	APL210Z-100	APL210Z-150
Travel	50 mm	100 mm	150 mm
absolute positioning accuracy	Nope. 350 nm		Nope. 450 nm
Repetitive positioning accuracy (unidirectional)	Nope. 150 nm		Nope. 200 nm
Repetitive positioning accuracy (bidirectional)	Nope. 200 nm		Nope. 250 nm
Resolution	0.1 nm
Straightness	± 0.4 um		± 0.6 um
Flatness	± 0.4 um		± 0.6 um
Dewing	±1.5 arcsec	±2 arcsec	±2.5 arcsec
Pitch	±1.5 arcsec	±2 arcsec	±2.5 arcsec
Scroll	±1.5 arcsec	±2 arcsec	±2.5 arcsec
orthogonality	±10 arcsec	±15 arcsec	±20 arcsec
Balanced air pressure	>0.2 Mpa
Maximum speed	200 mm/s
Maximum acceleration (no load)	0.5 g
Minimum step	3 nm
Load capacity (level)	15 kg
Partial moving weight (lower axis)	6.7 kg
Platform quality	21.5 kg	25.6 kg	30.2 kg
Materials	Anodized aluminum
Average service life	15000h

Remarks:

The default test point position is 25mm above the table, and the single-axis index and the performance index of the multi-axis system are related to the actual load and the position of the working point;
For higher demand, it needs to be equipped with Heidelhain grating ruler and linear amplifier;
No load, need to configure the corresponding power of the linear amplifier,
The payload specification assumes that the payload is centered on the axis;
In order to ensure the implementation and repeatability of the specification over a long period of time, the ambient temperature must be controlled within a range of 1°C per 24 hours.

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