APOS Series

The APOS series is driven by a non-backlash linear motor, in which the porous medium produces a uniform air film to realize the smooth movement of the motion table without friction and vibration. Due to the open air floating structure, it is more compact than the ordinary air floating structure. The system is equipped with a high-precision grating ruler, which improves the texture of the system's follow-up error compared to the mechanical guide structure, and the positioning accuracy and repeated positioning accuracy have been significantly improved.

Product features:

non-contact open air bearing structure
Nanometer Positioning Accuracy
High dynamic performance (cut-off frequency greater than 100Hz)
High response speed
High rigidity design
porous medium air bearing
High flexible cable management
Resolution 1nm, repeat positioning accuracy 80nm, positioning accuracy ± 100nm

Customizable (customizable ceramic structure)

Keywords: Optics

Classification:

Open air floating sports table

Online Message

Product inquiry

E-mail:

sales01@zssp-tech.com

Product Description

Product size plan

Mechanical Specifications	APOS-025	APOS-050	APOS-100
Travel	25 mm	50 mm	100 mm
absolute positioning accuracy	Nope. 100 nm	Nope. 150 nm	Nope. 200 nm
Repetitive positioning accuracy (unidirectional)	Nope 50 nm		Lamp 80 nm
Repetitive positioning accuracy (bidirectional)	Lamp 80 nm		Nope. 100 nm
Resolution	1 nm
Straightness	± 0.25 um		± 0.4 um
Flatness	± 0.25 um		± 0.4 um
Dewing	±0.5 arcsec	±0.75 arcsec	±1 arcsec
Pitch	±0.5 arcsec	±0.75 arcsec	±1 arcsec
Scroll	±0.5 arcsec	±0.75 arcsec	±1 arcsec
Maximum speed	300 mm/s
Maximum acceleration (no load)	1 g
Minimum step	1 nm
Load capacity (level)	15 kg
Partial moving weight	1.9 kg
Platform quality	4.5 kg	5.5 kg	6.4 kg
Materials	Anodized aluminum
Average service life	15000h

Remarks:

The default test point position is 25mm above the table, and the single-axis index and the performance index of the multi-axis system are related to the actual load and the position of the working point;
For higher demand, it needs to be equipped with Heidelhain grating ruler and linear amplifier;
No load, need to configure the corresponding power of the linear amplifier,
The payload specification assumes that the payload is centered on the axis;
In order to ensure the implementation and repeatability of the specification over a long period of time, the ambient temperature must be controlled within a range of 1°C per 24 hours.

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