MCHL Series
The MCHL series is driven by a linear motor and is equipped with high-precision, high-rigidity, creep-resistant cross-roller guides. MCHL is optimized for high dynamics and stiffness to achieve high servo bandwidth while maximizing the available aperture and keeping the overall height to a minimum.
Product features:
High response speed
High flexible cable management
Nanoscale positioning accuracy
High-precision anti-creep cross-roller guide
High dynamic performance (cut-off frequency greater than 100Hz)
Flexible configuration options (configurable single motor form)
Resolution 1nm, repeat positioning accuracy 250nm, positioning accuracy 500nm
Keywords: Optics
Classification:
Integrated XY hollow motion table

E-mail:
Product Description
Product size plan

Mechanical Specifications |
MCHL-150XY |
MCHL-250XY |
MCHL-350XY |
Hollow Size |
180 mm |
270 mm |
330 mm |
Travel |
120 mm |
350 mm |
|
absolute positioning accuracy |
Nope. 500 nm |
Nope. 650 nm |
Nope. 850 nm |
Repetitive positioning accuracy (unidirectional) |
Nope. 250 nm |
Nope. 350 nm |
|
Repetitive positioning accuracy (bidirectional) |
Nope. 350 nm |
||
Resolution |
1 nm |
||
Straightness |
± 0.8 um |
± 1 um |
|
Flatness |
± 2.5 um |
± 3.5 um |
|
Dewing |
±10 arcsec |
±12 arcsec |
±15 arcsec |
Pitch |
±10 arcsec |
±12 arcsec |
±15 arcsec |
Scroll |
±10 arcsec |
±12 arcsec |
±15 arcsec |
orthogonality |
±12 arcsec |
||
Maximum speed |
200mm/s |
||
Maximum acceleration (no load) |
1g |
||
Minimum step |
10 nm |
||
Load capacity (level) |
20kg |
||
Partial moving weight (upper axis) |
5.8 kg |
||
Partial moving weight (lower axis) |
25.5 kg |
48.5 kg |
80.5 kg |
Platform quality |
40.5 kg |
70.4 kg |
112 kg |
Materials |
Anodized aluminum |
||
Average service life |
30000h |
Remarks:
- The default test point position is 25mm above the table, and the single-axis index and the performance index of the multi-axis system are related to the actual load and the position of the working point;
- For higher demand, it needs to be equipped with Heidelhain grating ruler and linear amplifier;
- No load, need to configure the corresponding power of the linear amplifier,
- The payload specification assumes that the payload is centered on the axis;
- In order to ensure the implementation and repeatability of the specification over a long period of time, the ambient temperature must be controlled within a range of 1°C per 24 hours.
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