ARS80 Series
The ARS80 series uses small orifice throttling as the air support, and has a large air bearing surface, which can produce high stiffness and large load capacity, with extremely low radial runout and axial runout. The ARS80 series is precisely calculated and has excellent static and dynamic accuracy.
Product features:
High response speed
No mechanical contact
Excellent speed stability
Excellent error motion and swing performance
High torque output, frameless direct drive motor
Design of Configurable Dual Grating Ruler Reading Head
Adopt water cooling design to ensure thermal stability
Live configuration options (customizable hollow version)
Radial runout less than 100nm, axial runout less than 80nm
Keywords: Optics
Classification:
Air bearing spindle
E-mail:
Product Description
Product size plan
Mechanical Specifications |
MARH100 |
MARH150 |
Table Size |
1400 |
|
grating line |
11840 | |
Angle accuracy |
±18 arcsec |
|
One-way repeat accuracy |
±8 arcsec |
|
Bidirectional repeat accuracy |
±12 arcsec |
|
Maximum speed |
2000 rpm |
|
Cooling mode |
Water cooling |
|
Fixation method |
vacuum sucker |
|
Rated torque (no-load) |
1.35 n· m |
|
Maximum torque (no load) |
5.4 n· m |
|
Resolution |
1 arcsec |
|
radial runout |
80 one |
100 one |
Axial runout |
50 one |
80 one |
Minimum step |
5 arcsec |
5 arcsec |
Load capacity (level) |
15 kg |
10 kg |
Load capacity (vertical) |
20 kg |
15 kg |
Platform quality |
56 kg |
62 kg |
Materials |
nickel-plated alloy |
|
Average service life |
15000h |
|
Remarks:
- The default test point position is 25mm above the table, and the single-axis index and the performance index of the multi-axis system are related to the actual load and the position of the working point;
- For higher demand, it needs to be equipped with Heidelhain grating ruler and linear amplifier;
- No load, need to configure the corresponding power of the linear amplifier,
- The payload specification assumes that the payload is centered on the axis;
- In order to ensure the implementation and repeatability of the specification over a long period of time, the ambient temperature must be controlled within a range of 1°C per 24 hours.
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