HPL410 Series
HPL410 series by no backlash linear motor drive, the use of liquid static pressure technology to achieve precision movement of the guide rail, with high damping, high rigidity, and can achieve high and low speed transverse movement characteristics, it is the best solution to achieve rapid reciprocating oscillation motion, low speed no friction, no stick-slip phenomenon, which can achieve ultra high positioning accuracy.
Product features:
low speed and no friction
High rigidity design
High flexible cable management
Nanoscale positioning accuracy
Can be customized (can be customized a variety of itineraries)
Reverse movement without mechanical rolling element bouncing phenomenon
High thermal stability, active oil circulation and cooling design direct heat dissipation
Resolution 1nm, repeat positioning accuracy ± 200nm, positioning accuracy ± 350nm
Keywords: Optics
Classification:
Hydrostatic rail

E-mail:
Product Description
Product size plan

Mechanical Specifications |
APL210-150 |
APL210-200 |
APL210-300 |
Travel |
200 mm |
300 mm |
400 mm |
absolute positioning accuracy |
Nope. 350 nm |
Nope. 500 nm |
Nope. 650 nm |
Repetitive positioning accuracy (unidirectional) |
Nope. 200 nm |
Nope. 300 nm |
|
Repetitive positioning accuracy (bidirectional) |
Nope. 280 nm |
Nope. 400 nm |
|
Resolution |
0.1 nm |
||
Straightness |
± 0.35 um |
± 0.5 um |
± 0.7 um |
Flatness |
± 0.35 um |
± 0.5 um |
± 0.7 um |
Dewing |
±3 arcsec |
±5 arcsec |
±7 arcsec |
Pitch |
±3 arcsec |
±5 arcsec |
±7 arcsec |
Scroll |
±3 arcsec |
±5 arcsec |
±7 arcsec |
Maximum speed |
500 mm/s |
||
Maximum acceleration (no load) |
0.8 g |
||
Minimum step |
1 nm |
||
Load capacity (level) |
250 kg |
||
Load capacity (eccentric) |
150 kg |
||
Partial moving weight |
143 kg |
||
Platform quality |
450 kg |
590 kg |
750 kg |
Materials |
nickel-plated alloy |
||
Average service life |
15000h |
Remarks:
- The default test point position is 25mm above the table, and the single-axis index and the performance index of the multi-axis system are related to the actual load and the position of the working point;
- For higher demand, it needs to be equipped with Heidelhain grating ruler and linear amplifier;
- No load, need to configure the corresponding power of the linear amplifier,
- The payload specification assumes that the payload is centered on the axis;
- In order to ensure the implementation and repeatability of the specification over a long period of time, the ambient temperature must be controlled within a range of 1°C per 24 hours.
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