APRH Series

The APRH series uses porous materials as air support, which can achieve high stiffness and large load capacity. It not only has excellent axial and radial errors, but also has excellent tilt error motion. The resulting performance is significantly better than other rotating air bearing tables and spindles, greatly facilitating applications that require superior planar performance.

Product features:

low speed and no friction
High rigidity design
High flexible cable management
Nanoscale positioning accuracy
Can be customized (can be customized a variety of itineraries)
Reverse movement without mechanical rolling element bouncing phenomenon
High thermal stability, active oil circulation and cooling design direct heat dissipation
Resolution 1nm, repeat positioning accuracy ± 200nm, positioning accuracy ± 350nm

Keywords: Optics

Classification:

Air floating direct drive turntable

Online Message

Product inquiry

E-mail:

sales01@zssp-tech.com

Product Description

Product size plan

Mechanical Specifications	APRH100	APRH150	APRH200
Table Size	100 mm	150 mm	200 mm
grating line	9000	16384	23600
Angle accuracy	±15 arcsec	±12 arcsec	±8 arcsec
One-way repeat accuracy	±5 arcsec	±4 arcsec
Bidirectional repeat accuracy	±7 arcsec	±6 arcsec
Maximum speed	800 rpm
Maximum acceleration (no load)	410 wheel/s²	250 wheel/s²	185 wheel/s²
Rated torque (no-load)	0.4 n· m	1.35 n· m	2.5 n· m
Maximum torque (no load)	1.4 n· m	5.4 n· m	10 n· m
Resolution	0.01 arcsec
radial runout	0.3 um	0.5 um	0.7 um
Axial runout	1 one
Minimum step	0.2 arcsec
Load capacity (level)	10 kg	20 kg	35 kg
Load capacity (vertical)	3 kg	6 kg	10 kg
Platform quality	4.4 kg	7.5 kg	13.4 kg
Materials	Anodized aluminum
Average service life	25000h

Remarks:

The default test point position is 25mm above the table, and the single-axis index and the performance index of the multi-axis system are related to the actual load and the position of the working point;
For higher demand, it needs to be equipped with Heidelhain grating ruler and linear amplifier;
No load, need to configure the corresponding power of the linear amplifier,
The payload specification assumes that the payload is centered on the axis;
In order to ensure the implementation and repeatability of the specification over a long period of time, the ambient temperature must be controlled within a range of 1°C per 24 hours.

APRL Series

None