MCT130XY Series
The MCT130XY series has excellent planar performance and geometric characteristics due to its integrated dual-axis design. Driven by a linear motor, equipped with a rigid, creep-resistant cross-roller guide, high-resolution position feedback, is the smoothest and most accurate movement.
Product features:
High response speed
Nanoscale positioning accuracy
Anti-creep cross roller guide
Compact structure, XY integrated design
High dynamic performance (cut-off frequency greater than 100Hz)
Flexible configuration options (XY can be customized with unequal travel)
Resolution 1nm, repeat positioning accuracy 200nm, positioning accuracy 350nm
Keywords: Optics
Classification:
Integrated XY motion table
E-mail:
Product Description
Product size plan
Mechanical Specifications |
MCT130XY-050-050 |
MCT130XY-100-100 |
MCT130XY-150-150 |
Travel |
50mmx50mm |
100mmx100mm |
150mmx150mm |
absolute positioning accuracy |
Nope. 350 nm |
±400nm |
|
Repetitive positioning accuracy (unidirectional) |
Nope. 200 nm |
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Repetitive positioning accuracy (bidirectional) |
Nope. 250 nm |
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Resolution |
1 nm |
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Straightness |
± 0.5 um |
±0.7um |
± 1 um |
Flatness |
± 2 um |
± 2.5 um |
± 3 um |
Dewing |
±10 arcsec |
±12 arcsec |
±15 arcsec |
Pitch |
±10 arcsec |
±12 arcsec |
±15 arcsec |
Scroll |
±8 arcsec |
±10 arcsec |
±12 arcsec |
orthogonality |
±10 arcsec |
±15 arcsec |
±20 arcsec |
Maximum speed |
200mm/s |
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Maximum acceleration (no load) |
1g |
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In-place stability |
<10 nm |
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following error |
<10 nm |
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Minimum step |
10 nm |
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Load capacity (level) |
12kg |
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Partial moving weight (upper axis) |
0.6 kg |
1.1 kg |
1.5 kg |
Partial moving weight (lower axis) |
3.8 kg |
4.6 kg |
5.9 kg |
Platform quality |
5.6 kg |
7.4 kg |
9.1 kg |
Materials |
Black anodized aluminum |
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Average service life |
30000h |
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Remarks:
- The default test point position is 25mm above the table, and the single-axis index and the performance index of the multi-axis system are related to the actual load and the position of the working point;
- For higher demand, it needs to be equipped with Heidelhain grating ruler and linear amplifier;
- No load, need to configure the corresponding power of the linear amplifier,
- The payload specification assumes that the payload is centered on the axis;
- In order to ensure the implementation and repeatability of the specification over a long period of time, the ambient temperature must be controlled within a range of 1°C per 24 hours.
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We sincerely look forward to working with you!
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Card A, Room 103, No.39, Science and Technology East Road, Torch Development Zone, Zhongshan City
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